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Karlsruhe Nano Micro Facility
KIT-Campus North

Building 440

H.-von-Helmholtz-Platz 1

76344 Eggenstein-Leopoldshafen, Germany

 

phone: +49(721)608-23123

fax: +49(721)608-26273

knmf-userofficeIxa6∂kit edu

User Office

KNMF Profile

3D Atom Probe Tomography (APT)

KNMF Laboratory for Microscopy and Spectroscopy

Atom Probe Tomography allows the three-dimensional imaging of a tip-shaped specimen atom by atom. Additionally APT enables to determine the chemical composition on the atomic scale in an arbitrary analysis volume within the imaged sample volume. Typical APT specimens are sharp needles, which have to have apex diameters of about 100 nm or less, so that the surface atoms may get evaporated under a static high voltage (HV = 5-20 kV) and an additionally applied high-frequency HV or laser pulse. The time resolved and position sensitive detector analyses the type of the evaporated ions by Time-of-Flight mass spectroscopy. Combining the detector information the specimen can be reconstructed three dimensionally with almost atomic resolution. Fields of applications include e.g. metals and semiconductors.

Download technology description (PDF)

Contact

Dr. Torben Boll

Email torben bollBni1∂kit edu

Institute for Applied Materials (IAM-WK) - www.iam.kit.edu/wk/english

Features

  • APT type: LEAP 4000X HR
  • FOV: up to 250nm

    Voltage Atom Probe
  • High Voltage: up to 20 kV
  • Pulse frequency: up to 200 kHz

    Laser Atom Probe
  • Laser Wavelength: 355 nm
  • Spot size: < 3 µm
  • Pulsing frequencies: up to 250 kHz

    Available preparation techniques
  • FIB
  • Electro Polishing (only conductive materials)

Limitations/constraints

  • Spatial resolution (depth): 0.1 - 0.3 nm
  • Spatial resolution (lateral): 0.3 - 0.5 nm
  • Specimen dimensions:
  • sharp needles: length a few µm,
    tip apex: < 100 nm.

Materials

  • Metal, Semiconductors, Silicon